Fabry-Perot Pressure Sensor Arrays for Imaging Surface Pressure Distributions
نویسندگان
چکیده
A micromachined sensor array for making optical measurements of surface pressure distributions has been designed, fabricated and tested. Each sensor element in the array consists of a Fabry-Perot etalon fabricated from single-crystal silicon. Illuminating the sensor array with a near-infrared, tunable diode laser and detecting the reflected light intensity with an infrared camera allows remote, simultaneous recording of the reflectance signals from the entire array of passive sensors. Testing has been performed in a static pressure cell, and the results are compared to the predictions of design models. Also, imaging of arrays of sensors has been demonstrated.
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